Advanced Lithography , EPUB

06.10.2016 17:49

Advanced Lithography


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This book presents state-of-the-art information regarding the extensive field of advanced lithography. Advanced lithography expands into numerous sub-fields like micro electro-mechanical system (MEMS), nano-lithography, nano-physics, etc. In optimized electron device, nano-lithography reaches up to 20 nm in size. Subsequently, we have to analyze and develop true single nanometer size lithography. One of the solutions is to analyze a fusion of bottom up and top down technologies like EB drawing and self-assembly with block copolymer. In nano-photonics and MEMS, 3D structures are required for carrying out specific functions in the devices for applications. They are formed as a result of execution of numerous techniques like stereo-lithography, sputtering, colloid lithography, deposition, dry etching, etc. This book provides the readers with valuable information about nano structure, 3D structure, nano-lithography, and elucidates the methodology, techniques and applications of nano-lithography.
This book presents state-of-the-art information regarding the extensive field of advanced lithography. Advanced lithography expands into numerous sub-fields like micro electro-mechanical system (MEMS), nano-lithography, nano-physics, etc. In optimized electron device, nano-lithography reaches up to 20 nm in size. Subsequently, we have to analyze and develop true single nanometer size lithography. One of the solutions is to analyze a fusion of bottom up and top down technologies like EB drawing and self-assembly with block copolymer. In nano-photonics and MEMS, 3D structures are required for…mehr
  • Produktdetails
  • Verlag: NY RESEARCH PRESS
  • Seitenzahl: 260
  • 2015
  • Englisch
  • Abmessung: 229mm x 152mm x 18mm
  • Gewicht: 519g
  • ISBN-13: 9781632380166
  • ISBN-10: 1632380161
  • Best.Nr.: 42952192


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Thanks for the great share! Rep added.
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Love this share, awesome forum.
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looking forward to seeing this :)
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Great share!
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I can't thank you enough OP for your generous share!!
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